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Micro and nano fabrication tools and processes

Bibliographic Details
Main Authors: Gatzen, Hans H. (Author), Saile, Volker, Leuthold, Jürg
Other Authors: Muller, Richard S. (Author of introduction, etc.)
Format: Book
Language:English
Published: Berlin : Springer [2015]
Subjects:
nanotechnológia
mikrotechnológie
Nanotechnology
Microtechnology
Location:
AOSLM